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Determining sample alignment in X-ray Reflectometry using thickness and density from GaAs/AlAs multilayer certified reference materials

机译：使用厚度和厚度确定X射线反射测量中的样品对准   Gaas / alas多层认证参考材料的密度

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摘要

X-ray reflectometry (XRR) provides researchers and manufacturers with anon-destructive way to determine thickness, roughness, and density of thinfilms deposited on smooth substrates. Due to the nested nature of equationsmodeling this phenomenon, the inter-relation between instrument alignment andparameter estimation accuracy is somewhat opaque. In this study, weintentionally shift incident angle information contained in a high-quality XRRdata set and refine this shifted data using an identical structural model toassess the effect angle misalignment has on parameter estimation. We develop aseries of calibration curves relating data misalignment to variation with layerthickness and density for a multilayer GaAs/AlAs Certified Reference Materialon a GaAs substrate. We then test the validity and robustness of severalapproaches of using known thickness and density parameters from this structureto calibrate instrument alignment. We find the highest sensitivity to andlinearity with measurement misalignment from buried AlAs and GaAs layers, incontrast to the surface layers, which show the most instability. This is afortuitous result, as buried AlAs and GaAs exhibit the highest long-termstability in thickness. Therefore, it is indeed possible to use referencethickness estimates to validate XRR angle alignment accuracy. Buried layer massdensity information also shows promise as a robust calibration approach. Thisis suprising, as electron density of buried layers is both a highly-correlatedphenomenon, and a subtle component in the XRR model.
机译：X射线反射仪（XRR）为研究人员和制造商提供了一种非破坏性的方法，可以确定沉积在光滑基材上的薄膜的厚度，粗糙度和密度。由于建模此现象的方程式的嵌套性质，仪器对准与参数估计精度之间的相互关系有些不透明。在这项研究中，我们有意移动包含在高质量XRR数据集中的入射角信息，并使用相同的结构模型来细化此偏移数据，以评估角度未对准对参数估计的影响。我们针对GaAs衬底上的多层GaAs / AlAs认证参考材料，开发了一系列校准曲线，将数据失准与层厚度和密度的变化相关。然后，我们使用该结构的已知厚度和密度参数来测试仪器校准的几种方法的有效性和鲁棒性。我们发现，对于埋藏的AlAs和GaAs层，与表面层形成对比的测量失准，其线性度最高，灵敏度最高。这是不幸的结果，因为埋入式AlAs和GaAs的厚度表现出最高的长期稳定性。因此，确实有可能使用参考厚度估算值来验证XRR角度对准精度。埋层质量信息也显示出作为一种可靠的校准方法的希望。这令人惊讶，因为埋层的电子密度既是高度相关的现象，又是XRR模型中的细微成分。

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